Ultra-Precision 6DoF Pose Estimation Using 2-D Interpolated Discrete Fourier Transform

Ultra-precision estimation of 6DoF pose is essential in applications such as semiconductor manufacturing and nanoscale manipulation. Conventional vision-based techniques are often hampered by sensitivity to defocus and limited estimation accuracy. In this paper, we propose a novel two-dimensional interpolated Discrete Fourier Transform (2D-IpDFT) method for robust 6DoF pose estimation using periodic patterns. We further develop a mathematical framework that links image parameters-phase and frequency-to 6DoF pose, which is applicable to both orthographic and quasi-orthographic imaging systems. Extensive experiments on a low-cost setup, featuring an industrial camera and an etched checkerboard pattern, demonstrate translation estimation accuracy at the nanometer level and rotation estimation accuracy at the microradian level.