A Comprehensive Survey of Process Reward Models: Data Generation, Model Construction, and Usage

Although Large Language Models (LLMs) exhibit advanced reasoning ability, conventional alignment remains largely dominated by outcome reward models (ORMs) that judge only final answers. Process Reward Models (PRMs) address this gap by evaluating and guiding reasoning at the step or trajectory level. This survey provides a systematic overview of PRMs through the full loop: how to generate process data, build PRMs, and use PRMs for test-time scaling and reinforcement learning. We summarize applications across math, code, text, multimodal reasoning, robotics, and agents, and review emerging benchmarks. Our goal is to clarify design spaces, reveal open challenges, and guide future research toward fine-grained, robust reasoning alignment. To support these efforts, we accompany this survey with an actively updated GitHub repository ( https://github.com/despzcm/ Survey-of-Process-Reward-Model ).